LED Etcher

Description

We are a specialized company of dry etcher with a long experience and engineering technique to develop, manufacture and provide various kinf of etching systems, that can satisfy various needs of customers, are being applied from semiconductor to MEMS, LED and R&D.

Features

• High etch rate and superior uniformity
• Tray to tray full automatic process with non-stop running
• Optimized software with individual recipe control
• Lower CoC
• Full auto transfer system
• Multi sapphire wafer tray with back He cooling system
• Auto loading 5 Trays
• 2 Storage buffer chamber
• HEPA filter for particle control
• Customizing layout of type A & type B

Application

• PSS Etch
• GaN etch
• Ash
• R&D

PSS Etch